Advances in Imaging and Electron Physics: Advances in Electron Microscopy and Diffraction

Hawkes, Peter W.

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Table of contents
  • Contentsv
  • Contributorsix
  • Prefacexi
  • Future Contributionsxiii
  • Chapter 1. Signposts in Electron Optics1
  • I. Background1
  • II. Charged-Particle Optics3
  • III. Aberrations7
  • IV. Aberration Correction13
  • V. Monochromators17
  • VI. Wave Optics17
  • VII. Image Algebra21
  • References23
  • Chapter 2. Introduction to Crystallography29
  • I . Introduction to Crystal Symmetry29
  • II . Diffraction from a Lattice53
  • References70
  • Chapter 3. Convergent Beam Electron Diffraction71
  • I. Introduction71
  • II. More Advanced Topics82
  • Bibliography101
  • References101
  • Chapter 4. High-Resolution Electron Microscopy105
  • I. Basic Principles of Image Formation106
  • II. The Electron Microscope120
  • III. Interpretation of the Images147
  • IV. Quantitative HREM151
  • V. Precision and Experimental Design167
  • VI. Future Developments168
  • References169
  • Chapter 5. Structure Determination through Z-Contrast Microscopy173
  • I. Introduction173
  • II. Quantum Mechanical Aspects of Electron Microscopy175
  • III. Theory of Image Formation in the STEM186
  • IV. Examples of Structure Determination by Z-Contrast Imaging191
  • V. Practical Aspects of Z-Contrast Imaging200
  • VI. Future Developments202
  • VII. summary202
  • References203
  • Chapter 6. Electron Holography of Long-Range Electromagnetic Fields: A Tutorial207
  • I. Introduction207
  • II. General Considerations208
  • III. The Magnetized Bar212
  • IV. Electrostatic Fields: A Glimpse at Charged Microtips and Reverse-Biased p-n Junctions218
  • V. Conclusion221
  • References221
  • Chapter 7. Electron Holography: A Powerful Tool for the Analysis of Nanostructures225
  • I. Electron Interference225
  • II. Electron Coherence227
  • III. Electron Wave Interaction with Object229
  • IV. Conventional Electron Microscopy (TEM)231
  • V. Electron Holography238
  • VI. Summary254
  • Suggested Reading254
  • References254
  • Chapter 8. Crystal Structure Determination from EM Images and Electron Diffraction Patterns257
  • I. Solution of Unknown Crystal Structures by Electron Crystallography257
  • II. The Two Steps of Crystal Structure Determination258
  • III. The Strong Interaction between Electrons and Matter259
  • IV. Determination of Structure Factor Phases260
  • V. Crystallographic Structure Factor Phases in EM Images265
  • VI. The Relation between Projected Crystal Potential and HRTEM Images266
  • VII. Recording and Quantification of HRTEM Images and SAED . Patterns for Structure Determination267
  • VIII. Extraction of Crystallographic Amplitudes and Phases from HRTEM Images269
  • IX. Determination of and Compensation for Defocus and Astigmatism271
  • X. Determination of the Projected Symmetry of Crystals276
  • XI. Interpretation of the Projected Potential Map279
  • XII. Quantification of and Compensation for Crystal Thickness and Tilt280
  • XIII. Crystal Structure Refinement282
  • XIV. Extension of Electron Crystallography to Three Dimensions285
  • XV. Conclusion286
  • References286
  • Chapter 9. Direct Methods and Applications to Electron Crystallography291
  • I. Introduction291
  • II. The Minimal Prior Information292
  • III. Scaling of the Observed Intensities293
  • IV. The Normalized Structure Factors and Their Distributions295
  • V. Two Basic Questions Arising from the Phase Problem295
  • VI. The Structure Invariants298
  • VII. A Typical Phasing Procedure304
  • VIII. Direct Methods for Electron Diffraction Data306
  • References309
  • Chapter 10. Strategies in Electron Diffraction Data Collection311
  • I. Introduction311
  • II. Method to Improve the Dynamic Range of Charge-Coupled Device CCD) Cameras312
  • III. ELD and QED: Two Software Packages for ED Data Processing313
  • IV. The Three-Dimensional Merging Procedure314
  • V. The Precession Technique316
  • VI. Conclusion324
  • References325
  • Chapter 11. Advances in Scanning Electron Microscopy327
  • I. Introduction327
  • II. The Classical SEM328
  • III. Advances in the Design of the SEM Column340
  • IV. Specimen Environment and Signal Detection357
  • References370
  • Chapter 12. On the Spatial Resolution and Nanoscale Feature Visibility in Scanning Electron Microsco375
  • I. Introduction375
  • II. Backscattered Electron Imaging379
  • III. Secondary Electron Imaging391
  • IV. BSE-to-SE Conversion393
  • V. Conclusion396
  • References397
  • Chapter 13. Nanoscale Analysis by Energy-Filtering TEM399
  • I. Introduction399
  • II. Elemental Mapping400
  • III. Quantitative Analysis of ESI Series405
  • IV. Mapping of ELNES409
  • V. Conclusion411
  • References411
  • Chapter 14. Ionization Edges: Some Underlying Physics and Their Use in Electron Microscopy413
  • I. Introduction413
  • II. Elastic and Inelastic Collisions415
  • III. Counting the Elastic and Inelastic Events418
  • IV. Transitions to the Unoccupied States420
  • V. Electron-Atom Interaction422
  • VI. Orientation Dependence429
  • VII. Orders of Magnitude430
  • VIII. Mixed Dynamic Form Factor432
  • IX. Examples of Applications435
  • X. Images445
  • XI. Conclusion446
  • Appendix446
  • References447
  • Index451
Book details
  • Vendor Elsevier S & T
  • SKU 9780120147656
  • ISBN-13 9780080525471
  • Author Hawkes, Peter W.
  • Category Technology & Engineering
  • Subject Microelectronics

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Advances in Imaging and Electron Physics merges two long-running serials--Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. The series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.