Elsevier S & T

Capture Pumping Technology, 2nd Fully Revised Edition

Welch, K.

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Table of contents
  • Cover
  • Table of Contentsvii
  • Prefacexii
  • Biographical Notexiii
  • Acknowledgementsxiv
  • CHAPTER 1. BASIC THEORY1
  • 1.0 Introduction, Pump Classification1
  • 1.1 Pump Capacity1
  • 1.2 Understanding Pump Behavior1
  • 1.3 The Ideal Gas Assumptions2
  • 1.4 Definitions of Temperature and Pressure2
  • 1.5 Counting Molecules (or Atoms)5
  • 1.6 Density, Pressure and Molecular Velocities6
  • 1.7 Vapor Pressure8
  • 1.8 Mean Free Path12
  • 1.9 Thermal Conductivity of Gases15
  • 1.10 Pumping Speed, a Convenient Abstraction17
  • 1.11 Throughput19
  • 1.12 Conductance, Another Convenient Abstraction20
  • 1.13 Voltage, Current and Impedance Analogies25
  • 1.14 Dalton's Law and Linear Superposition28
  • 1.15 Selective and Variable Pumping Speed32
  • 1.16 Measuring Pump Speed33
  • 1.17 System Diagnostics With Any Pump42
  • 1.18 Electrical Discharges in Gases44
  • 1.19 Vacuum Seals62
  • 1.20 Comments on Helium Leak Detection71
  • Problem Set76
  • References78
  • CHAPTER 2. SPUTTER-ION PUMPING83
  • 2.0 Introduction83
  • 2.1 The Penning Cell84
  • 2.2 I + /P Characteristics in Penning Cells86
  • 2.3 Pumping Speed Abstraction93
  • 2.4 The Making of Sputter-Ion Pumps94
  • 2.5 Hydrogen Pumping119
  • 2.6 Triode Pumping138
  • 2.7 Transient Speed Effects142
  • 2.8 Pumping Gas Mixtures143
  • 2.9 High Pressure Operation145
  • 2.10 The Sputter-lon Pumping of Helium149
  • 2.11 Pumping Elements Located in Antechambers or Pockets154
  • 2.12 Pump Power Supplies158
  • 2.13 Magnet Designs160
  • 2.14 More on the Nature of Penning Discharges164
  • 2.15 Other Considerations173
  • 2.16 A Summary of Advantages and Disadvantages175
  • Problem Set179
  • References181
  • CHAPTER 3. TITANIUM SUBLIMATION PUMPING195
  • 3.0 Introduction195
  • 3.1 Sticking Coefficients196
  • 3.2 Pump Speed vs. Sticking Coefficient200
  • 3.3 Synthesis, Displacement and Dissociation of Gases208
  • 3.4 Sublimation Sources210
  • 3.5 Combination Pumping220
  • 3.6 Advantages and Disadvantages of TSP Pumping222
  • Problem Set223
  • References224
  • CHAPTER 4. NONEVAPORABLE GETTERS (NEG)229
  • 4.0 Introduction229
  • 4.1 Mechanical Features229
  • 4.2 NEG Pumping Mechanisms232
  • 4.3 Sintered NEG Structures246
  • 4.4 Advantages and Disadvantages of NEGs248
  • Problem Set249
  • References251
  • CHAPTER 5. CRYOPUMPING255
  • 5.0 Introduction255
  • 5.1 Cryocondensation vs . Cryosorption255
  • 5.2 Sorption Roughing Pumps284
  • 5.3 Liquid Helium Cryopumps295
  • 5.4 Closed-Loop, Gaseous Helium Cryopumps301
  • 5.5 Closed-Loop, Gaseous Helium Refrigerators321
  • Problem Set331
  • References334
  • AUTHOR INDEX353
  • SUBJECT INDEX345
Book details
  • Vendor Elsevier S & T
  • SKU 9780444508829
  • ISBN-13 9780080528489
  • Author Welch, K.
  • Edition 2nd
  • Category Technology & Engineering
  • Subject Mechanical

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This is a practical textbook written for use by engineers, scientists and technicians. It is not intended to be a rigorous scientific treatment of the subject material, as this would fill several volumes. Rather, it introduces the reader to the fundamentals of the subject material, and provides sufficient references for an in-depth study of the subject by the interested technologist. The author has a lifetime teaching credential in the California Community College System. Also, he has taught technical courses with the American Vacuum Society for about 35 years. Students attending many of these classes have backgrounds varying from high-school graduates to Ph.D.s in technical disciplines. This is an extremely difficult class profile to teach. This book still endeavors to reach this same audience. Basic algebra is required to master most of the material. But, the calculus is used in derivation of some of the equations. The author risks use of the first person I, instead of the author, and you instead of the reader. Both are thought to be in poor taste when writing for publication in the scientific community. However, I am writing this book for you because the subject is exciting, and I enjoy teaching you, perhaps, something new. The book is written more in the vein of a one-on-one discussion with you, rather than the author lecturing to the reader. There are anecdotes, and examples of some failures and successes I have had over the last forty-five years in vacuum related activities, I'll try not to understate either.
Lastly, there are a few equations which if memorised will help you as a vacuum technician. There are less than a dozen equations and half that many rules of thumb to memorize, which will be drawn on time an again in designing, operating and trouble-shooting any vacuum system.