Confocal Scanning Optical Microscopy and Related Imaging Systems
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Table of contents
- Cover
- Contentsvii
- Prefacexiii
- Chapter 1. Introduction1
- 1.1 Confocal and Interferometric Microscopy1
- 1.2 The Standard Optical Microscope7
- 1.3 The Confocal Microscope31
- 1.4 Optical Interference Microscopes44
- 1.5 Comparison of Scanning Optical Microscopes with Other Types of Scanning Microscopes56
- References63
- Chapter 2. Instruments67
- 2.1 Introduction67
- 2.2 The Confocal Scanning Laser Microscope68
- 2.3 Nipkow Disk Scanning Microscopes84
- 2.4 Slit Microscopes97
- 2.5 Confocal Transmission Microscopes104
- 2.6 Alternative Imaging Configurations108
- 2.7 Interference Microscopes110
- 2.8 Near-Field Microscopy120
- 2.9 Conclusion138
- References139
- Chapter 3. Depth and Transverse Resolution147
- 3.1 Introduction147
- 3.2 Depth Response of the Confocal Microscope with Infinitesimal Pinholes and Slits149
- 3.3 Depth Response of the Confocal Microscope with Finite-Sized Pinholes165
- 3.4 Transverse Response of the Confocal Microscope175
- 3.5 Depth and Transverse Resolution of the Interferometric Microscope189
- 3.6 The Near-Field Scanning Optical Microscope (NSOM)206
- 3.7 The Solid Immersion Microscope (SIM)212
- 3.8 Conclusion220
- References220
- Chapter 4. Phase Imaging225
- 4.1 Introduction225
- 4.2 Phase-Contrast Imaging in Conventional Microscopes226
- 4.3 Phase-Contrast Imaging in the CSOM229
- 4.4 Differential Interference Contrast Imaging247
- 4.5 Phase Imaging with an Interference Microscope266
- 4.6 Conclusion272
- References272
- Chapter 5. Applications277
- 5.1 Introduction277
- 5.2 Semiconductor Metrology278
- 5.3 Film Thickness Measurements300
- 5.4 Biological Imaging308
- 5.5 Conclusion316
- References317
- Appendix A: Vector Field Theory for Depth and Transverse Resolution of a CSOM323
- A.1 The Depth Response323
- A.2 Transverse Response326
- References330
- Index331
This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope (CSOM), and the Optical Interference Microscope (OIM). A comprehensive discussion of the theory and design of the Near-Field Scanning Optical Microscope (NSOM) is also given.
The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology.A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes.
Key Features
* Provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers
* Explains many practical applications of scanning optical and interference microscopy in such diverse fields as biology and semiconductor metrology
* Discusses in theoretical terms the origin of the improved depth and transverse resolution of scanning optical and interference microscopes with emphasis on the practical results of the theoretical calculations
* Considers the practical aspects of building a confocal scanning or interference microscope and explores some of the design tradeoffs made for microscopes used in various applications
* Discusses the theory and design of near-field optical microscopes
* Explains phase imaging in the scanning optical and interference microscopes
The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology.A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes.
Key Features
* Provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers
* Explains many practical applications of scanning optical and interference microscopy in such diverse fields as biology and semiconductor metrology
* Discusses in theoretical terms the origin of the improved depth and transverse resolution of scanning optical and interference microscopes with emphasis on the practical results of the theoretical calculations
* Considers the practical aspects of building a confocal scanning or interference microscope and explores some of the design tradeoffs made for microscopes used in various applications
* Discusses the theory and design of near-field optical microscopes
* Explains phase imaging in the scanning optical and interference microscopes