Electron Collisions with Molecules in Gases: Applications to Plasma Diagnostics and Modeling: Applications to Plasma Diagnostics and Modeling
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Table of contents
- Contentsv
- Contributorsvii
- Prefaceix
- Chapter 1. Mechanisms of Electron Transport in Electrical Discharges and Electron Collision Cross Se1
- I. Introduction2
- II. Major Characteristics of Collisions and Reactions in Discharges and Plasmas3
- III. Cross Sections and Reaction Rate Constants of Atomic and Molecular Processes6
- IV. Measurements of Electron Collision Cross Sections and Illustrative Results8
- V. Measurements of Partial Cross Sections with the Use of the Appearance Potential in Mass Spectrome23
- VI. Measurements of Cross Sections for the Production of Positive and Negative Ions25
- VII. Outlook29
- VIII. Acknowledgments30
- IX. References31
- Chapter 2. Theoretical Consideration of Plasma-Processing Processes33
- I. Introduction33
- II. An Example of Electron-Molecule Scattering34
- III. Overview of Theoretical Framework37
- IV. Current Level of the Accuracy of Theoretical Approaches49
- V. Excited Species53
- VI. Perspective and Conclusion55
- VII. Acknowledgment56
- VIII. References56
- Chapter 3. Electron Collision Data for Plasma-Processing Gases59
- I. Introduction59
- II. Plasma-Processing Gases60
- III. Data Assessment65
- IV. Assessed Cross Sections and Coefficients83
- V. Boltzmann-Code-Generated Collision Cross-Section Sets93
- VI. Conclusions95
- VII. References96
- Chapter 4. Radical Measurements in Plasma Processing99
- I. Introduction99
- II. Summary of Recent Developments in Measurement Methods for Radicals in Plasma Processing100
- III. Details of in Situ Measurement Methods for Radicals in Processing Plasmas102
- IV. Representative Results of CFx and SiHx Radicals in Processing Plasmas108
- V. Conclusions123
- VI. References124
- Chapter 5. Radio-Frequency Plasma Modeling for Low-Temperature Processing127
- I. Introduction127
- II. Radio-Frequency Electron Transport Theory128
- III. Modeling of Radio-Frequency Plasmas141
- IV. Conclusions153
- V. Acknowledgments153
- VI. References153
- Chapter 6. Electron Interactions with Excited Atoms and Molecules155
- I. Introduction156
- II. Electron Scattering from Excited Atoms159
- III. Electron-Impact Ionization of Excited Atoms200
- IV. Electron Scattering from Excited Molecules213
- V. Electron-Impact Ionization of Excited Molecules223
- VI. Electron Attachment to Excited Molecules226
- VII. Concluding Remarks282
- VIII. Acknowledgment283
- IX. Appendix A283
- X. References285
- Subject Index295
- Contents of Volumes in this Series305
This series, established in 1965, is concerned with recent developments in the general area of atomic, molecular, and optical physics. The field is in a state of rapid growth, as new experimental and theoretical techniques are used on many old and new problems. Topics covered also include related applied areas, such as
atmospheric science, astrophysics, surface physics, and laser physics. Articles are written by distinguished experts who are active in their research fields. The articles contain both relevant review material as well as detailed descriptions of important recent developments.
atmospheric science, astrophysics, surface physics, and laser physics. Articles are written by distinguished experts who are active in their research fields. The articles contain both relevant review material as well as detailed descriptions of important recent developments.