The Local Chemical Analysis of Materials

Martin, J. W.

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Table of contents
  • The Local Chemical Analysis of Materialsiii
  • Copyright Pageiv
  • Contentsxiii
  • Series Prefacev
  • Prefacevii
  • Acronymsix
  • Introductionxi
  • Chapter 1. Atom Probe Microanalysis3
  • 1.1. The Field Ion Microscope3
  • 1.2. The Conventional (One-Dimensional) Atom Probe6
  • 1.3. Energy Compensated Atom Probe (ECAP)8
  • 1.4. The Three-Dimensional Atom Probe (3DAP)10
  • 1.5. Analysis of Interfaces by AP11
  • 1.6. Atom Probe Studies of Semiconductor Materials14
  • 1.7. Studies of Thin Films15
  • 1.8. Adsorption and Surface Reactions16
  • References16
  • Chapter 2. X-Ray Probes for Surface Analysis (XPS Or ESCA)21
  • 2.1. Sample Preparation for Surface Analysis21
  • 2.2. X-ray Sources22
  • 2.3. The Photoionisation Process23
  • 2.4. Instrumentation25
  • 2.5. Chemical Analysis27
  • 2.6. Areas of XPS Application to the Surface Analysis of Materials31
  • References38
  • Further Reading38
  • Chapter 3. Infrared (IR) and Ultraviolet (UV) Probes for Surface Analysis41
  • 3.1. IR Spectroscopy41
  • 3.2. Raman Microscopy50
  • 3.3. Laser Microprobe Mass Spectrometry59
  • References64
  • Further Reading65
  • Chapter 4. Ion Beam Probes for Surface Analysis69
  • 4.1. Introduction69
  • 4.2. Secondary Ion Mass Spectroscopy (SIMS)71
  • 4.3. Rutherford Back-Scattering Spectrometry (RBS)83
  • 4.4. Heavy Ion Backscattering Spectroscopy (HIBS)95
  • 4.5. Proton-Induced X-ray Emission (PIXE)97
  • 4.6. Proton Induced Gamma-Ray Emission (PIGE)106
  • 4.7. Elastic Recoil Detection Analysis (ERDA)111
  • 4.8. Nuclear Reaction Analysis (NRA)117
  • 4.9. Charged Particle Activation Analysis (CPAA)121
  • References125
  • Further Reading126
  • Chapter 5. Materials Analysis by Electron Beam Probes129
  • 5.1. High Resolution Analytical Electron Microscopy (HRAEM)129
  • 5.2. Electron Probe Microanalysis in the Scanning Electron Microscope137
  • 5.3. Analytical Tem147
  • 5.4. Auger Electron Spectroscopy (AES)169
  • 5.5. Electron Energy Loss Spectroscopy (EELS)185
  • 5.6. High Resolution Electron Loss Spectroscopy (HREELS)194
  • References199
  • Further Reading200
  • Chapter 6. The Choice of Technique203
  • 6.1. Surface Analysis203
  • 6.2. The Analytical TEM210
  • References211
  • Subject Index213
  • Materials Index215
Book details
  • Vendor Elsevier S & T
  • SKU 9780080439365
  • ISBN-13 9780080535579
  • Author Martin, J. W.
  • Category Science
  • Subject Physical & Theoretical

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* Expert, up-to-date guidance on the appropriate techniques of local chemical analysis
* Comprehensive. This volume is an ideal starting point for material research and development, bringing together a number of techniques usually only found in isolation
* Recent examples of the applications of techniques are provided in all cases


Helping to solve the problems of materials scientists in academia and industry, this book offers guidance on appropriate techniques of chemical analysis of materials at the local level, down to the atomic scale. Comparisons are made between various techniques in terms of the nature of the probe employed. The detection limit and the optimum spatial resolution is also considered, as well as the range of atomic number that may be identified and the precision and methods of calibration, where appropriate.



The Local Chemical Analysis of Materials is amply illustrated allowing the reader to easily see typical results. It includes a comparative table of techniques to aid selection for analysis and a table of acronyms, particularly valuable in this jargon-riddled area.