Vacuum Ultraviolet Spectroscopy
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Table of contents
- Cover
- Contentsiii
- Contributorsviii
- Chapter 1. Normal-Incidence Monochromators and Spectrometers1
- 1.1. Concave Grating Monochromators and Spectrometers1
- 1.2. Plane Grating Monochromators and Spectrometers17
- References19
- Chapter 2. Grazing-Incidence Monochromators for Third-Generation Synchrotron Radiation Sources21
- 2.1. Introduction21
- 2.2. Grating Theory23
- 2.3. Application of Aberration Theory to the Design of an Undulator-Based SGM33
- 2.4. Focusing in Variable-Included-Angle Monochromators43
- 2.5. Diffraction Efficiency46
- 2.6. An Optimized Beam Line for Microscopy by Photoelectron Emission Microscopy and Micro-X-Ray Phot47
- References52
- Chapter 3. Spectrographs and Monochromators Using Varied Line Spacing Gratings55
- 3.1. Limitations of Uniformly Spaced Grating Instruments55
- 3.2. Paraxial Focusing Equations for VLS Gratings56
- 3.3. Harada-Style Focusing58
- 3.4. Hettrick-Style Focusing60
- 3.5. Flat Field Spectrographs and Spectrometers62
- 3.6. Light Path Function for a System of a Mirror and a VLS Grating65
- 3.7. Monochromators for Synchrotron Radiation66
- 3.8. Holographically Recorded Gratings70
- 3.9. Conclusions70
- References70
- Chapter 4. Interferometric Spectrometers73
- 4.1. Introduction73
- 4.2. Fabry–Perot Interferometry77
- 4.3. Fourier Transform Spectrometry: Principal Features80
- 4.4. Fourier Transform Spectrometry in Practice in the VUV87
- 4.5. Spatially Heterodyned, Nonscanning Interferometers for FTS93
- 4.6. All-Reflection FT Spectrometers97
- 4.7. Soft X-Ray FTS by Grazing Reflection99
- References105
- Chapter 5. Gas Detectors107
- 5. I. Ionization Chambers107
- 5.2. Proportional Counters112
- References115
- Chapter 6. Photodiode Detectors117
- 6.1. Introduction117
- 6.2. Radiometric Standards118
- 6.3. Photodiode Types119
- 6.4. Proper Use of Photodiodes in the VUV134
- References137
- Chapter 7. Amplifying and Position Sensitive Detectors139
- 7.1. Photon Detection139
- 7.2. Amplifying Detectors148
- 7.3. Position Sensing Techniques162
- References172
- Chapter 8. Absolute Flux Measurements177
- 8.1. Introduction177
- 8.2. Primary Radiator Radiometry178
- 8.3. Primary Detector Radiometry179
- 8.4. Transfer Detector Standards for Absolute Flux Measurement186
- 8.5. Conclusion189
- References190
- Chapter 9. Vacuum Techniques193
- 9.1. Introduction193
- 9.2. Design of the Vacuum Environment193
- 9.3. Leak Detection200
- 9.4. Optics Cleaning202
- References203
- Chapter 10. Lithography205
- 10.1. Integrated Circuit Fabrication and Lithographic Process205
- 10.2. Photoresist in Lithography206
- 10.3. Optical Lithography208
- 10.4. X-Ray Lithography214
- References221
- Chapter 11. X-Ray Spectromicroscopy225
- 11.1. Introduction225
- 11.2. X-Ray Spectromicroscopy Approaches230
- 11.3. Applications239
- 11.4. Discussion256
- 11.5. Conclusions257
- References258
- Chapter 12. Optical Spectroscopy in the VUV Region263
- 12.1. Introduction263
- 12.2. Wavelength Measurements and Energy Levels265
- 12.3. Intensity Measurements and Cross Sections270
- References275
- Chapter 13. Soft X-Ray Fluorescence Spectroscopy279
- 13.1. Introduction279
- 13.2. Characteristics of the Soft X-Ray Fluorescence Spectra of Solids282
- 13.3. Instrumentation for SXF Spectroscopy293
- 13.4. Survey of Recent SXF Spectroscopy Research297
- References298
- Index301
Techniques of Vacuum Ultraviolet Spectroscopy was first published in 1967. In the three decades since, the techniques associated with vacuum ultraviolet spectroscopy have been greatly expanded. Originally published as two volumes in the serial "Experimental Methods in the Physical Sciences," Vacuum Ultraviolet Spectroscopy combines in one paperback volume information on the many advances in vacuum ultraviolet (VUV) research. In addition, the book provides students and researchers with concise reviews of the important aspects of designing experiments in the VUV region.
This is the only comprehensive treatise describing the use of synchrotron and other light sources for research, along with the new technologies in optical elements, multilayers, mirror coatings, soft x-ray zone plates, VUV detectors, interferometric spectrometers, and subjects such as spectromicroscopy, lithography, and photon-induced fluorescence. Vacuum Ultraviolet Spectroscopy is an ideal handbook both for the beginner and for the experienced researcher in any field requiring the use of VUV radiation.
Key Features
* Detailed review of synchrotron radiation sources including undulators and wigglers
* Comprehensive outline of monochromator design
* Concise review of optics theory for multilayers, spectrometers, and zone plates
* Information about other important VUV sources such as laser produced plasmas and Electron Beam Ion Trap (EBIT) sources
* Applications such as spectromicroscopy, lithography, and fluorescence
This is the only comprehensive treatise describing the use of synchrotron and other light sources for research, along with the new technologies in optical elements, multilayers, mirror coatings, soft x-ray zone plates, VUV detectors, interferometric spectrometers, and subjects such as spectromicroscopy, lithography, and photon-induced fluorescence. Vacuum Ultraviolet Spectroscopy is an ideal handbook both for the beginner and for the experienced researcher in any field requiring the use of VUV radiation.
Key Features
* Detailed review of synchrotron radiation sources including undulators and wigglers
* Comprehensive outline of monochromator design
* Concise review of optics theory for multilayers, spectrometers, and zone plates
* Information about other important VUV sources such as laser produced plasmas and Electron Beam Ion Trap (EBIT) sources
* Applications such as spectromicroscopy, lithography, and fluorescence