Vacuum Ultraviolet Spectroscopy II
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Table of contents
- Cover
- Contentsiii
- Contributorsviii
- Chapter 1. Normal-Incidence Monochromators and Spectrometers1
- 1.1. Concave Grating Monochromators and Spectrometers1
- 1.2. Plane Grating Monochromators and Spectrometers17
- References19
- Chapter 2. Grazing-Incidence Monochromators for Third-Generation Synchrotron Radiation Sources21
- 2.1. Introduction21
- 2.2. Grating Theory23
- 2.3. Application of Aberration Theory to the Design of an Undulator-Based SGM33
- 2.4. Focusing in Variable-Included-Angle Monochromators43
- 2.5. Diffraction Efficiency46
- 2.6. An Optimized Beam Line for Microscopy by Photoelectron Emission Microscopy and Micro-X-Ray Phot47
- References52
- Chapter 3. Spectrographs and Monochromators Using Varied Line Spacing Gratings55
- 3.1. Limitations of Uniformly Spaced Grating Instruments55
- 3.2. Paraxial Focusing Equations for VLS Gratings56
- 3.3. Harada-Style Focusing58
- 3.4. Hettrick-Style Focusing60
- 3.5. Flat Field Spectrographs and Spectrometers62
- 3.6. Light Path Function for a System of a Mirror and a VLS Grating65
- 3.7. Monochromators for Synchrotron Radiation66
- 3.8. Holographically Recorded Gratings70
- 3.9. Conclusions70
- References70
- Chapter 4. Interferometric Spectrometers73
- 4.1. Introduction73
- 4.2. Fabry–Perot Interferometry77
- 4.3. Fourier Transform Spectrometry: Principal Features80
- 4.4. Fourier Transform Spectrometry in Practice in the VUV87
- 4.5. Spatially Heterodyned, Nonscanning Interferometers for FTS93
- 4.6. All-Reflection FT Spectrometers97
- 4.7. Soft X-Ray FTS by Grazing Reflection99
- References105
- Chapter 5. Gas Detectors107
- 5. I. Ionization Chambers107
- 5.2. Proportional Counters112
- References115
- Chapter 6. Photodiode Detectors117
- 6.1. Introduction117
- 6.2. Radiometric Standards118
- 6.3. Photodiode Types119
- 6.4. Proper Use of Photodiodes in the VUV134
- References137
- Chapter 7. Amplifying and Position Sensitive Detectors139
- 7.1. Photon Detection139
- 7.2. Amplifying Detectors148
- 7.3. Position Sensing Techniques162
- References172
- Chapter 8. Absolute Flux Measurements177
- 8.1. Introduction177
- 8.2. Primary Radiator Radiometry178
- 8.3. Primary Detector Radiometry179
- 8.4. Transfer Detector Standards for Absolute Flux Measurement186
- 8.5. Conclusion189
- References190
- Chapter 9. Vacuum Techniques193
- 9.1. Introduction193
- 9.2. Design of the Vacuum Environment193
- 9.3. Leak Detection200
- 9.4. Optics Cleaning202
- References203
- Chapter 10. Lithography205
- 10.1. Integrated Circuit Fabrication and Lithographic Process205
- 10.2. Photoresist in Lithography206
- 10.3. Optical Lithography208
- 10.4. X-Ray Lithography214
- References221
- Chapter 11. X-Ray Spectromicroscopy225
- 11.1. Introduction225
- 11.2. X-Ray Spectromicroscopy Approaches230
- 11.3. Applications239
- 11.4. Discussion256
- 11.5. Conclusions257
- References258
- Chapter 12. Optical Spectroscopy in the VUV Region263
- 12.1. Introduction263
- 12.2. Wavelength Measurements and Energy Levels265
- 12.3. Intensity Measurements and Cross Sections270
- References275
- Chapter 13. Soft X-Ray Fluorescence Spectroscopy279
- 13.1. Introduction279
- 13.2. Characteristics of the Soft X-Ray Fluorescence Spectra of Solids282
- 13.3. Instrumentation for SXF Spectroscopy293
- 13.4. Survey of Recent SXF Spectroscopy Research297
- References298
- Index301
This volume is for practitioners, experimentalists, and graduate students in applied physics, particularly in the fields of atomic and molecular physics, who work with vacuum ultraviolet applications and are in need of choosing the best type of modern instrumentation. It provides first-hand knowledge of the state-of-the-art equipment sources and gives technical information on how to use it, along with a broad reference bibliography.